Brookhaven Products
Current Integrators:
- 1000C - Wide range integrator for nuclear
research and general laboratory applications.
- DoseMaster - Wide range integrator for ion
implanters.
- XP1000 - Current Integrator for Varian 300XP and
350DE ion implanters.
ScanMaster II Solid-state Scan Amplifier: (Available for these implanter models).
- Varian: 300XP,
350D, DF/CF3000, DF/CF5000, DF/CF4, 400-10
- Eaton: 3204, 3206
- Veeco: 400MPH
It is possible that the ScanMaster II can
be interfaced to other implanters.
Implant Dosimetry
Assurance (IDA):
- Supervisory
circuitry to prevent wafer scrap.
Current Sources:
- 1000DDC calibrated
current source for the Dosemaster.
- 1000XPC calibrated
current source for the XP1000 Current Integrator.
Return to BIC Home Page