Protection & Assurance

Dosemaster Model 350

The Brookhaven Dosemaster Models 100 and 350 Dose Controllers are Plug-Compatible Upgrades for selected Varian Dual and Single End-Station Implanters.

"With the introduction of the Model 1000 in 1964 Brookhaven set the standard for accuracy and reliability in current integration. Four decades later Brookhaven continues to define industry standards. Combining accuracy with state-of-the-art wafer-saving supervisory circuitry, the DoseMaster significantly contributes to improved yield and provides nearly total protection against disastrous product losses from faulty ion implantation."

Edwin J. Rogers, Founder

Brookhaven Instruments Corporation

The DoseMaster 100 and 350 dose controllers are current integrators designed specifically for controlling the amount of dose applied to a wafer by an ion implanter during the semiconductor manufacturing process. These dose controllers insure repeatable dose measurement accuracy to +/- 0.02% of full-scale +/- 30pA at 25ºC as seen in the specifications below.

Protection

Employing proprietary circuitry, the DoseMaster monitors the process continuously during implantation, halts the implant, activates aural and visual alarms, and identifies the fault when any of the four major causes of dose error and non-uniformity is detected. These are:

• Negative beam current - as from Photoresist outgassing occurring during the implant.
• Improper setup - insufficient overscan causes the ion beam to overdose the area along the inside edges of the wafer.
• Lost scan signal - causes severe overdosing of an area through the center of the wafer (striping).
• Scan waveform distortion - due to scan amplifiers.

Assurance

• Stability and Accuracy: Exclusive Brookhaven circuitry virtually eliminates drift even at low nanoampere beam currents.
• Linearity: The industry's most linear current-to-frequency conversion provides dose repeatability from current range to current range, introducing no significant dose error even when operating at a very small fraction of full scale.
• Certified NIST Traceability: Calibration can be verified on any of the twelve current ranges in seconds with the microprocessor-controlled current source.
• Reliability: Backed by Brookhaven's four decades of electronic design and manufacturing, the Dosemaster is one of a family of instruments enjoying the highest MTBF in the industry.

Verification (Using the Dosemaster 100 or 350 you may)

• Verify calibration on any of its twelve current ranges.
• Validate dose parameter settings via timed, simulated implants.
• Detect and measure leakage current, as from dirty insulators.

Specifications (DoseMaster 100 and 350 only)

• Beam Current Ranges: 20nA, 60nA, 200nA, etc. through 6mA in twelve ranges.
• Current Integration Accuracy: +/- 0.02% full-scale +/- 30Pa AT 25ºC.
• Temperature Coefficient: +/- 20ppm per degree C (typical), +/- 50ppm per degree C (max).
• Peak Over-Range Capability: Up to 560% of full scale.
• Dose Range: 1.000 E10 ions/cm² through 9.999 E18 ions/cm².
• Implant Area: 10.00 cm² through 999.9 cm².
• I/O Capability: RS-232 port.
• Dimentions: Standard 5.25" X 19" rack-mount panel, depth 14".
• Power: 110 VAC +/- 15%, 50-60 Hz, 220/240 VAC available.
• Installation Time: Less than one hour by a qualified technician.

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