Protection
& Assurance

Dosemaster
Model 350
The Brookhaven Dosemaster Models 100 and 350 Dose Controllers are Plug-Compatible Upgrades for
selected Varian Dual and Single End-Station Implanters.
"With the
introduction of the Model 1000 in 1964 Brookhaven set the standard for accuracy
and reliability in current integration. Four decades later Brookhaven continues
to define industry standards. Combining accuracy with state-of-the-art wafer-saving supervisory circuitry, the DoseMaster
significantly contributes to improved yield and provides nearly total protection against disastrous product losses from faulty
ion implantation."
Edwin
J. Rogers, Founder
Brookhaven
Instruments Corporation
The DoseMaster 100 and 350 dose controllers
are current integrators designed specifically for controlling the amount of
dose applied to a wafer by an ion implanter during the semiconductor
manufacturing process. These dose controllers insure repeatable dose
measurement accuracy to +/- 0.02% of full-scale +/- 30pA at 25ºC as seen in the
specifications below.
Protection
Employing proprietary circuitry, the
DoseMaster monitors the process continuously during
implantation, halts the implant, activates aural and visual alarms, and
identifies the fault when any of the four major causes of dose error and
non-uniformity is detected. These are:
- Negative beam current - as from Photoresist outgassing occurring during
the implant.
- Improper setup - insufficient overscan causes the ion beam to overdose the area
along the inside edges of the wafer.
- Lost scan signal - causes severe overdosing of an area through the center of the
wafer (striping).
- Scan waveform distortion - due to scan amplifiers.
Assurance
- Stability and Accuracy: Exclusive
Brookhaven circuitry virtually eliminates drift even at low nanoampere
beam currents.
- Linearity:
The industry's most linear
current-to-frequency conversion provides dose repeatability from current
range to current range, introducing no significant dose error even when
operating at a very small fraction of full scale.
- Certified NIST Traceability: Calibration can be verified on any of the twelve
current ranges in seconds with the microprocessor-controlled current
source.
- Reliability:
Backed by Brookhaven's four
decades of electronic design and manufacturing, the Dosemaster is one of a
family of instruments enjoying the highest MTBF in the industry.
Verification (Using the Dosemaster 100 or 350 you may)
- Verify calibration on any of its twelve current ranges.
- Validate dose parameter settings via timed, simulated implants.
- Detect and measure leakage current, as from dirty insulators.
Specifications (DoseMaster 100 and 350 only)
- Beam Current Ranges: 20nA, 60nA, 200nA, etc. through 6mA in twelve ranges.
- Current Integration Accuracy: +/- 0.02% full-scale +/- 30Pa AT 25ºC.
- Temperature Coefficient:
+/- 20ppm per degree C
(typical), +/- 50ppm per degree C (max).
- Peak Over-Range Capability: Up to 560% of full scale.
- Dose Range: 1.000
E10 ions/cm2 through 9.999 E18 ions/cm2.
- Implant Area: 10.00
cm2 through 999.9 cm2.
- I/O Capability: RS-232
port.
- Dimentions: Standard 5.25" X 19" rack-mount panel,
depth 14".
- Power: 110
VAC +/- 15%, 50-60 Hz, 220/240 VAC available.
- Installation Time: Less than one hour by a qualified technician.
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