Protection & Assurance

Dosemaster Model 350

The Brookhaven Dosemaster Models 100 and 350 Dose Controllers are Plug-Compatible Upgrades for selected Varian Dual and Single End-Station Implanters.

"With the introduction of the Model 1000 in 1964 Brookhaven set the standard for accuracy and reliability in current integration. Four decades later Brookhaven continues to define industry standards. Combining accuracy with state-of-the-art wafer-saving supervisory circuitry, the DoseMaster significantly contributes to improved yield and provides nearly total protection against disastrous product losses from faulty ion implantation."

Edwin J. Rogers, Founder

Brookhaven Instruments Corporation

The DoseMaster 100 and 350 dose controllers are current integrators designed specifically for controlling the amount of dose applied to a wafer by an ion implanter during the semiconductor manufacturing process. These dose controllers insure repeatable dose measurement accuracy to +/- 0.02% of full-scale +/- 30pA at 25ºC as seen in the specifications below.

Protection

Employing proprietary circuitry, the DoseMaster monitors the process continuously during implantation, halts the implant, activates aural and visual alarms, and identifies the fault when any of the four major causes of dose error and non-uniformity is detected. These are:

Assurance

Verification (Using the Dosemaster 100 or 350 you may)

Specifications (DoseMaster 100 and 350 only)

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