Brookhaven Products

Current Integrators:

• 1000C - Wide range integrator for nuclear research and general laboratory applications.
• DoseMaster - Wide range integrator for ion implanters.
• XP1000 - Current Integrator for Varian 300XP and 350DE ion implanters.

ScanMaster II Solid-state Scan Amplifier: (Available for these implanter models).

• Varian: 300XP, 350D, DF/CF3000, DF/CF5000, DF/CF4, 400-10
• Eaton: 3204, 3206
• Veeco: 400MPH

Contact Brookhaven about interfacing the ScanMaster II to your implanter.

Scan Monitor Scope:

• Digital storage scope, a plug-compatible upgrade for the 3 1/2 inch scope originally supplied with Varian medium-current ion implanters.
• Also part of the Scanguard 6200-1.

Implant Dosimetry Assurance (IDA):

• Supervisory circuitry to prevent wafer scrap.

Current Sources:

• 1000DDC calibrated current source for the Dosemaster.
• 1000XPC calibrated current source for the XP1000 Current Integrator.

Scanguard 6200-1:

• Supervisory circuitry for Eaton 6200 ion implanters, used to prevent wafer scrap.
• Includes Scan Monitor Scope.

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