New Products

The Brookhaven ScanGuard 6200-1 Fault Detector

NEW (May - 2003) Supervisory Circuitry for Eaton 6200 ion implanters.

The ScanGuard 6200-1 is a scan-signal monitor, composed of a Fault Detector and a Scan Monitor Scope. The Fault Detector monitors the system signals for proper operation, detecting malfunction in real time. As abnormal operations occur, the ScanGuard 6200-1 prevents the implanter from misprocessing wafers and sends an interrupt request to the Scan Monitor Scope. The scope stores images of the system signals. This allows an engineer to review and analyze the structure of the signals as they were at the time of the problem, reducing troubleshooting time by quickly identifying the faulty waveform.

Detection time for all fault conditions monitored is less than 10 mSec, and in most cases is less than 5 mSec. Every effort is made to ‘save the wafer’, in addition to saving the batch when a fault condition occurs.

Fault conditions detected:

• Lost DC scan-control voltages.
• Lost AC scan signals, as well as scan amplitude reduction, and signal non-linearity.
• Positive and Negative leakage currents in the Faraday, the front panel meter indicating the polarity and value of the leakage current. The level of leakage current required to stop the implant is user-selected at 1% or 4%.

Scan Monitor Scope:

• Automatically stores 26 scan images.
• Signals to be stored are user-selected.
• May be used independently from the ScanGuard 6200-1 as a troubleshooting scope.

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